1999 Ebara EPO-2228
1999 Ebara EPO-2228
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Description
Tool Status Connected
Wafer Size 200 mm
Fab Section CMP
Asset Description Ebara 222 Oxide CMP Polisher
Software Version 3.5.14
CIM SECS/GEM
Process ILD/IMD CMP Oxide
Handler System Robot 1 & Robot 2 2
Factory Interface SMIF 2
Specifications
| Manufacturer | Ebara |
| Model | EPO-2228 |
| Year | 1999 |
| Condition | Used |
| Stock Number | BM3669 |