2008 TEL Indy IRAD

Tool Status Running Wafers

Wafer Size 300 mm

Fab Section Diffusion

Asset Description TEL Furnace

Software Version 6.01

CIM secs-gem

Process MLD Nitride

Main System Tel Indy Mainframe 1

Factory Interface FOUP 2

Options System Gas Detector box 1

Options System RCU (Rapid Cooling Unit) 1

208VAC UPS 1

Rapid cooling unit 1