AMAT P5000 RIE
AMAT P5000 RIE
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Description
RIE
150mm
SiO2, SiNx & Si
2 chambers with full gas panel
Computerized endpoint system
ESC wafer handling
Through the wall
15 Slot storage elevator
Phase IV robot
Polyimide ESC
Chambers
A MxP Oxide, Oxide/Nitride Etch gas panel
B MxP Oxide, Oxide/Nitride Etch gas panel
200mm Conversion kit
Specifications
| Manufacturer | AMAT |
| Model | P5000 RIE |
| Condition | Used |
| Stock Number | BM3676 |