AMAT P5000 RIE

RIE

150mm

SiO2, SiNx & Si

2 chambers with full gas panel

Computerized endpoint system

ESC wafer handling

Through the wall

15 Slot storage elevator

Phase IV robot

Polyimide ESC

Chambers

               A MxP Oxide, Oxide/Nitride Etch gas panel

               B MxP Oxide, Oxide/Nitride Etch gas panel

200mm Conversion kit