AMAT ENDURA 5500
AMAT ENDURA 5500
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Description
150mm
Narrow Body Load Lock
Through the Wall Installation
Water cooled Cryo compressor
MFC: STEC 4400
Chamber 1
AlPVD
Standard body
Heater type: 4F
Chamber 2
Ti PVD
Wide Body
Chamber 3
AlPVD
Standard Body
Heater type: 4F
Specifications
| Manufacturer | AMAT |
| Model | ENDURA 5500 |
| Condition | Used |
| Stock Number | BM3677 |