AMAT P5000 Metal Etch
AMAT P5000 Metal Etch
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Description
150mm
Through the wall installation
Independent He Cooling
Phase III Robot
Phase III Cassette Handler
Bolt Down Lid
Loadlock Particle Reduction
Phase IV RF Match
Expanded VME
28 Slot Gas Panel
Specifications
| Manufacturer | AMAT |
| Model | P5000 Metal Etch |
| Condition | Used |
| Stock Number | BM3678 |