2005 TEL Lithius

Tool status: running wafers

Wafer size: 300mm

Fab section: lithography

Asset description: 2 block machine

Software version: 300.0.130.2

CIM: SECS

Process: coat, development

Factory interface: FOUP 4

Temp/ Hum. controller: 2

Power box 1

Resist cabinet 1

Developer cabinet 1

Coater cabinet 1