1999 CFM FullFlow 1/99 8100

Tool Status Connected

Wafer Size 200 mm

Fab Section Clean

Asset Description 8100 HP & Sulfuric Ozone CFM

Software Version 04.11.11.1

CIM SECS

Process HP & Sulfuric Ozone

Main System CFM Software 1

Factory Interface Open Cassette 1

Missing/ Faulty Parts/ Accessories List:

Upper Transition 1 Carrier 1 Computer 1 Lower Transition 1 Transfer Motherboard 2 1 Transfer Motherboard 1 1