2010 KLA QTX-300

Tool Status Connected

Wafer Size 300 mm

Fab Section Metrology

Asset Description DQTX702

Software Version V36029

CIM SECS/GEM

Process Surface Charge Measurement

Main System MainFram 1

Handler System ASD Handler 1

Factory Interface FOUP 2

Missing/ Faulty Parts/ Accessories List:

Main CPU 1