TEL Alpha 8 SE Vertical Furnace

8"

This system has been refurbished by TEL in 2018

The unit is fully functional and has PAC to prevent cracking

a.           Qty: 1

b.           Base unit ONO process.

c.           Type I deep bay frame

d.           Waves controller

e.           Wafer Diameter: 200 mm

f.            Load: 170 slot boat (150 wfr load size) with boat rotation

g.           Heater element: 500C – 1000C

h.           Process gases: NH3, DCS, N2O, N2