2000 AMAT Quantum Leap II Low Energy Implanter

2000 AMAT Quantum Leap II Low Energy Implanter

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Description

Tool Status Connected

Wafer Size 200 mm

Software Version 4.13-00z Beta



Main System Quantum Leap Implanter 1

Handler System NA

Factory Interface FOUP

Heat Exchanger 1

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Specifications

ManufacturerAMAT
ModelQuantum Leap II Low Energy Implanter
Year2000
ConditionUsed
Stock NumberBM3801