ALCAN TECH / CANON MAS-8000 Plasma Photo resist stripper

2 available

Plasma Photoresist Stripper, 2ea

• Wafer Size Range   Maximum 200 mm  Set Size 200 mm
• Heated & Water Cooled Platen for up to 200mm Wafers
• Dual Cassette Load/Unload Platforms
• MECS UTW-3100P Three Axis Wafer Robot
• MECS CS-1000 Robot Control System
• NIHON KOSHUHA MKN-152-3S Microwave Power Supply
• NIHON KOSHUHA MKN-152-384-OSC Microwave Oscillator Section
• NIHON KOSHUHA MPA-HZ4SI Power Sensor Amplifier
• NIHON KOSHUHA AMC-0604-15 Auto Matching Controller
• NIHON KOSHUHA Microwave Waveguide
• 3ea NIHON KOSHUHA MPS-60 Microwave Leak Detectors
• MKS 253A-11321 Throttle Valve
• MKS 252C-11009 Throttle Valve Controller
• ALCAN TECH HC-1000 Heater Controller
• ALCAN TECH PDA-801 Controller
• ALCATEL ADS-301 Dry Vacuum Pump/Blower Package
• Stainless Steel System Vacuum Plumbing
• Facilities Plumbing Cabinet
• Main Power Circuit Breaker Cabinet