BIORAD Q5 Overlay Metrology Tool

Overlay Metrology Tool

Overlay Registration Tool - Has Been Upgraded to a Q6

CD Measurement, Single and Two-Axis Overlay Registration

• Wafer Size Range   Minimum 75 mm  Maximum 200 mm
• Cassette to Cassette YES
• Number of Sort Elevators 2
• Other Information 
• Anti-Static Load Station with Dual 8” Cassette Elevators
• Dual Wafer Pickup Tool with Optical Flatfinder
• Vacuum Chuck for 3” - 8” Wafers
• Wide & Narrow Optical Channels
• Dual COHU Series 6700 CCD Cameras
• Dual MITSUBISHI Diamond Scan AUM-1391A Color Monitors
• BIORAD Y5308000 Video Multiswitch
• MITSUBISHI P68U Video Copy Processor
• OK INDUSTRIES PulseFlow Controller
• BIORAD Y7000010 System Control Console

Condition Good