BIORAD Q5 Overlay Metrology Tool
BIORAD Q5 Overlay Metrology Tool
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Description
Overlay Metrology Tool
Overlay Registration Tool - Has Been Upgraded to a Q6
CD Measurement, Single and Two-Axis Overlay Registration
- Wafer Size Range Minimum 75 mm Maximum 200 mm
- Cassette to Cassette YES
- Number of Sort Elevators 2
- Other Information
- Anti-Static Load Station with Dual 8” Cassette Elevators
- Dual Wafer Pickup Tool with Optical Flatfinder
- Vacuum Chuck for 3” - 8” Wafers
- Wide & Narrow Optical Channels
- Dual COHU Series 6700 CCD Cameras
- Dual MITSUBISHI Diamond Scan AUM-1391A Color Monitors
- BIORAD Y5308000 Video Multiswitch
- MITSUBISHI P68U Video Copy Processor
- OK INDUSTRIES PulseFlow Controller
- BIORAD Y7000010 System Control Console
Condition Good
Specifications
| Manufacturer | BIORAD |
| Model | Q5 |
| Condition | Used |
| Stock Number | 121504.0 |