BIORAD Q7/Q8 Overlay Metrology Tool

Overlay Metrology / CD Measurement Tool for up to 200mm Wafers

• Wafer Size Range   Maximum 200 mm
• Cassette to Cassette YES
• Other Information Date of Mfg: 12/30/97
• Configured for 150mm Wafers
• 2ea Send & Receive Cassette Elevators for 75mm – 200mm Wafers
• Wafer Loading Arm with Optical Flatfinder
• XYZ Stage with 200mm Wafer Chuck & Stage Fiducial
• 3.5X, 30X & 70X Objectives Lenses
• 2ea COHU 6700 Series CCD Cameras
• Model 6100000 Xenon Illumination Lamp House
• System Controller with UNIX Based Operating System
• VME Box with FORCE ELECTRONICS SYS68K CPU-30BE/16 CPU
• Digital Tape Backup and 3 ½” Floppy Disk Drive
• 2ea LCD Monitors
• MITSUBISHI P68U Video Copy Processor
• SECS/GEM Communications
• CE Marked