KLA-TENCOR AlphaStep 300 Profilometer

Profilometer

• Date of Mfg: 4/92
• ±10 mm Scan Length
• 2 to 250 µm/sec Scan Speed
• 50/sec nominal Sampling Rate
• Vertical Resolution
• 1Å Resolution ±6.5 µm
• 25Å Resolution ±150µm
• 1.0-100 mg Stylus Programmable Force Range
• 0.1 mg Stylus Programmable Force Resolution
• 210 mm X, Y Maximum Travel
• 254 x 254 mm Maximum Sample Size