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KLA-TENCOR AlphaStep 300 Profilometer

KLA-TENCOR AlphaStep 300 Profilometer

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Description

Profilometer

  • Date of Mfg: 4/92
  • ±10 mm Scan Length
  • 2 to 250 µm/sec Scan Speed
  • 50/sec nominal Sampling Rate
  • Vertical Resolution
  • 1Å Resolution ±6.5 µm
  • 25Å Resolution ±150µm
  • 1.0-100 mg Stylus Programmable Force Range
  • 0.1 mg Stylus Programmable Force Resolution
  • 210 mm X, Y Maximum Travel
  • 254 x 254 mm Maximum Sample Size


Specifications

ManufacturerKLA-TENCOR
ModelAlphaStep 300
Year1992
ConditionUsed
Stock Number104306.0