KLA-TENCOR Surfscan Un-Patterned Wafer Surface Inspection

Fully Refurbished & Calibrated

TENCOR Surfscan 4500 Unpatterned Wafer Surface Inspection Tool

Cassette to Cassette Handling of 3” – 6” Wafers

New HeNe 2mW Laser, 632.8 nm Wavelength

New HeNe Laser Power Supply

0.2 µ Particle Size Sensitivity

Automatic Calibration

Flatscreen Monitor

System Calibrated & Demonstrated

Calibration Standard Wafer Included