MACTRONIX UKA-650 Wafer Transfer Tool

Wafer Transfer Tool - Eureka III Sr. for 150mm Wafers Manufacturer Mactronix Model UKA-650 Description Automatic Wafer Transfer Station Other Information Transfers Wafers Between one 25-slot Carrier and One 50 Slot Quartz Boat Carriers/Boats can be Plastic, Teflon, Quartz, Silicon Carbide, Polysilicon and Metal Air Operated Minimized Wafer Contact Preserved Flat Alignment Hard Black Anodized Frame Retainers Default to Closed Position to Prevent Dropping Wafers in the Event of Air Pressure Loss Vacuum Sensors Pressure: 70 to 90 PSI C.D.A. or N2 Vacuum: 20"-22" Hg Exterior Dimensions   Width 8.200  in  (20.8 cm)   Depth 12.200  in  (31.0 cm)   Height 26.300  in  (66.8 cm)