Complete photolitographic line FALCON

Complete photolitographic line FALCON

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Description

Complete photolitographic line FALCON Vintage: 1997 - Wafer size: 8 inch Layout: - it has 1 coater, 1 developer - see attached Footprint.jpg - it has 2 pcs. of installed Coldplates - see attacehed photo - it has 5 pcs. of installed Hotplates - see attached photo - it has 3 pcs. of spare Hotplates - see attached photo
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Specifications

ManufacturerFairchild Convac GmbH (with cooperation of Suss Microtec Technologies)
ModelFALCON VS11626
Year1997
ConditionUsed
Stock Number8047.0