Complete photolitographic line FALCON
Complete photolitographic line FALCON
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Description
Complete photolitographic line FALCON
Vintage: 1997 -
Wafer size: 8 inch
Layout:
- it has 1 coater, 1 developer - see attached Footprint.jpg
- it has 2 pcs. of installed Coldplates - see attacehed photo
- it has 5 pcs. of installed Hotplates - see attached photo
- it has 3 pcs. of spare Hotplates - see attached photo
Specifications
| Manufacturer | Fairchild Convac GmbH (with cooperation of Suss Microtec Technologies) |
| Model | FALCON VS11626 |
| Year | 1997 |
| Condition | Used |
| Stock Number | 8047.0 |