Brooks G450 Edge inspection Tool

Brooks G450 Edge inspection Tool

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Description

Still installed in Laboratory The Edge Inspection System BevelCam MC 450 is a tool for the automated, camera based inspection of the edge region of 450 mm wafers. It allows obtaining dark field as well as bright field

Specifications

ManufacturerBrooks
ModelG450
Year2012
ConditionUsed
Stock NumberNY003