Brooks G450 Edge inspection Tool
Brooks G450 Edge inspection Tool
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Description
Still installed in Laboratory
The Edge Inspection System BevelCam MC 450 is a tool for the automated, camera based inspection of the edge region of 450 mm wafers. It allows obtaining dark field as well as bright field
Specifications
| Manufacturer | Brooks |
| Model | G450 |
| Year | 2012 |
| Condition | Used |
| Stock Number | NY003 |