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1995 TEL Alpha 808S

1995 TEL Alpha 808S

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Description

ToolStatus Connected

WaferSize 200mm

FabSection Diffusion

AssetDescription VERTICALDIFFUSION


FURNACE

SoftwareVersion TS4000

CIM SECS/GEM

Process POCL3


MainSystem Maintool 1

HandlerSystem Builtinunits 2

FactoryInterface SMIF 2


UPS 1

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Specifications

ManufacturerTEL
ModelAlpha 808S
Year1995
ConditionUsed
Stock NumberBM4001