1995 TEL Alpha 808S

ToolStatus Connected

WaferSize 200mm

FabSection Diffusion

AssetDescription VERTICALDIFFUSION

FURNACE

SoftwareVersion TS4000

CIM SECS/GEM

Process POCL3

MainSystem Maintool 1

HandlerSystem Builtinunits 2

FactoryInterface SMIF 2

UPS 1