1999 TEL Alpha-8S-Z
1999 TEL Alpha-8S-Z
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Description
ToolStatus Connected
WaferSize 200mm
FabSection Diffusion
AssetDescription VERTICALLPCVD
FURNACE(NITDE)(QTY3)
SoftwareVersion TS4000
CIM SECS/GEM
Process Nitride
MainSystem MAINTOOL 1
HandlerSystem Builtinunits
FactoryInterface SMIF 2
UPS 1
Specifications
| Manufacturer | TEL |
| Model | Alpha-8S-Z |
| Year | 1999 |
| Condition | Used |
| Stock Number | BM4002 |