TEL Tactras Vesta NV3

Currently Configured for: 300mm

Available date: Currently Available

1. Main Frame
2. 1 * Loader Module
3. 3 * Load Port Unit
4. 1 * Vaccum Transfer Module
5. 1* Transfer Module
6. 2*Loadlock Module
7. 4 * Process Module​
8. 4 * Process Module
9. PM1: Vesta NV3
10. PM2: Vesta NV3
11. PM5: RF-3
12. PM6: Vesta NV3
13. 3 * HF RF Power Supply
14. 4 * Gas Box
15. 3 * RF Generators
16. 3 * TMP Controller
17. Support Equipment
18. 2 * AC Distribution Box