1996 Varian E500 HP Ion Implanter

Working condition before shutting down, but it's sold based on As Is

Wafer : 150 mm.

Vintage : 1996.

Signal Tower Front (Red, yellow, green)

Production Wafer Qty' 1 wafer (single platen)

Platen Type Mechanical Clamp

Loadloack Left/Right 2 Chambers

S/w version 12.10.21

Implant Monitor LCD Touchscreen

Service Monitor LCD Touchscreen

2.) System Vacuum

Ion Source Chamber CCIG/Torr

Beamline Chamber CCIG/Torr

End Station Chamber CCIG/Torr

3.) Pumps

Source Dry Punp iQDP80

Stage Pump iQDP80+QMB500

Loadlock Rough Pump iQDP80

Loadlock Turbo Pump CTI100

Process Chamber CT-10

Source Turbo Pump Leybold MAG W 1300C

Resolaper Turbo Pump Pfeiffer HiPace 300

Beamline Turbo Pump Pfeiffer TMH521YP