Electrotech PECVD ND 5

Electrotech PECVD ND 5

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Description

ELECTROTECH PECVD DEP SiN-SiC (Sio2) Wafer Size: 6 Inch Gases Used: CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4

Specifications

ManufacturerELECTROTECH
Year1995
ConditionUsed
Stock NumberEV005