Electrotech PECVD ND 3
Electrotech PECVD ND 3
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Description
ELECTROTECH PECVD DEP SiN-SiC (Sio2)
Gases used:
CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4
Specifications
| Manufacturer | ELECTROTECH |
| Condition | Used |
| Stock Number | EV003 |