Advanced Vacuum AB PV310 PECVD
Advanced Vacuum AB PV310 PECVD
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Description
PECVD 6 inch
Gases used:
CF4-O2-Ar-N2-SiH4-NH3-5%SiH4/AR-CH4
Specifications
| Manufacturer | STS |
| Model | PV310 |
| Condition | Used |
| Stock Number | EV006 |