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Advanced Vacuum AB PV310 PECVD

Advanced Vacuum AB PV310 PECVD

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Description

PECVD 6 inch Gases used: CF4-O2-Ar-N2-SiH4-NH3-5%SiH4/AR-CH4
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Specifications

ManufacturerSTS
ModelPV310
ConditionUsed
Stock NumberEV006