Electrotech PECVD ND 2
Electrotech PECVD ND 2
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Description
ELECTROTECH PECVD DEP SiN-SiC (Sio2)
Gas Supply:
CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4
Specifications
| Manufacturer | ELECTROTECH |
| Condition | Used |
| Stock Number | EV002 |