Zygo Laser Interferometer

Zygo Interferometer Specs: Weight: 170 lb (77 kg) Measurement Technique: Phase shifting interferometry Laser: Type: frequency stabilized Helium-Neon laser with fiber optic output Wavelength: 1550 nanometers Maximum Output Power: <1 milliwatt Output Power at Instrument Aperture: ?1 milliwatt Test Beam Diameter: 3 mm Coherence Length: ?10 meters Objectives: Mounting: Dovetail Type: Infinity Corrected SLWD Mag. N.A. Working Dist. 50X 0.45(1) 13.80 mm 100X 0.73 4.70 mm (1) 0.38 NA useable Z-Drive (Focus) Stage: Motor: DC brushless, microstepper Drive: leadscrew Range: 6 in. (152 mm) Resolution: 4 ?in. (0.1 ?m) X/Y Stage: Motor: DC brushless, microstepper Drive: leadscrew Range: 6 in. (152 mm) Resolution: 4 ?in. (0.1 ?m) Maximum Velocity: 0.50 in/sec (12.7 mm/sec) Sample Viewing: Camera Size: 640 x 480 pixels maximum Viewing: 9 in. monochrome video monitor and MetroPro on-screen display Focus: manual or automatic Test Part Characteristics: Type: nominally spherical surfaces (using obective) and flat surfaces(without objective) Radius of Curvature: from 100 ?m to 3 mm Reflectivity: 4 to 100 % Utility Requirements: Electrical: 90 – 250 VAC, 50/60 Hz (for laser power supply, motor driver assembly, video monitor, and computer) The MicroLUPI receives +12 VDC from Zygo Controller Board installed in the computer. Compressed Air (for Vibration Isolation Table):60 psi minimum, with 1/4 in. input Operating Environment: Temperature: 15° to 30°C (59° to 86° F) Rate of Temperature Change: <1.0°C/15 min. Humidity: 5 to 95% relative, noncondensing Vibration: Frequency Isolation 1Hz < freq < 120Hz Compliance: DHHS Laser Safety Classification: Class II laser product conforming to NCDRH regulations.