2000 NIKON NSR-2205EX14C

200mm

Fab Section Lithography 

Software Version MCSV E3.42, OCSV E3.42,

CIM SECS

Process Lithography Exposure Step and Repeat Stepper

Main System NSR Main Body & Control Rack 1

Main System Cymer Laser 1

Main System Temperature Controller Rack 1

Main System Handler System Wafer Loader Type 3 1

Factory Interface SMIF 2