Nikon S202+ Scanner

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Description

- Res 250 nm - NA 0.60 - KrF excimer laser (248 wavelength) Exposure light source - Field 25 x33 mm exposure - Ratio 1:4 - Alignment accutacy (EGA,  I M I + 3s ) ? 45 nm

Specifications

ManufacturerNikon
ModelS202+
Year2003
ConditionUsed
Stock NumberOD225172