March PX1000 etcher

March PX1000 etcher

Contact us for price

orCall +353 (0) 87 192 1110

Description

Batch systems for plasma cleaning or etching. Currently configured with only one 17 in. x 14 in. shelf set of 2 Shelves. Can accommodate multiple shelves. RFX-600 13.56 MHz, 600W RF generator. Two gas inputs, Gas Valve Assembly No Missing parts. Does not include vacuum pump. Batch systems for plasma cleaning or etching. Currently configured with only one 17 in. x 14 in. shelf set. Can accommodate multiple shelves. RFX-600 13.56 MHz, 600W RF generator. Two gas inputs. Does not include vacuum pump at this price, additional cost depending on type required.

Specifications

ManufacturerMarch
ModelPX1000
ConditionUsed
Stock NumberTC0348
Wafer Size200mm