ULVAC FRE-200E
ULVAC FRE-200E
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Description
ULVAC - XeF2 Etch Release FRE-200E
Manufacturer: ULVAC
Model: FRE-200E
Equipment Details: RF Power supply.
Voltage: 208V Frequency: 60Hz
Phase, Wire: 3Phase, 3Wire+ G Line
Full Load Current: 142A
Max Load(unit): 15.5A
Over current protective: 250A
Short Circuit Current Rating: 5Ka
Specifications
| Manufacturer | ULVAC |
| Model | FRE-200E |
| Year | 2014 |
| Condition | Used |
| Stock Number | TC0613 |
| Wafer Size | 200mm |