Optiprobe 5240

Fully refurbished OP5240 3 months warranty. Can be extended. Installation and basic training included. NT software with IOPT and TFMS CPU 700 Mhz PRI ATM105 Robot with ESC200 Prealigner. 2 open cassettes Vintage 2000 Measurements technologies: Beam Profile Reflectometry (BPR) – The BPR measures the reflected light at various angles through a single lens. The measured angular reflectivity curves are then compared with computer generated film models to determine the most likely composition of the actual film stack. FIBER LASER Beam Profile Ellipsometery (BPE) – The BPE measures the integrated phase shift between two different orientations of the incident laser beam as it passes through the film stack. This information is used, in conjunction with theoretical models to determine the thickness of very thin films. FIBER LASER Visible Spectrometer (VS) – The spectrometer measures the reflected light at various different visible wavelengths. The measured reflectivity curves are then compared to computer generated film models to determine the most likely composition of the actual film stack. WL LIGHT 400 - 800NM Broad Band Spectrometer (BB) (some models) – The BB spectrometer is similar to the visible spectrometer except that the optical wavelengths used in the measurements are extended down to ultra-violet wavelengths. WL AND DUV 190- 800NM Absolute Ellipsometry (AE) (some models) – Absolute Ellipsometry is used to measure the phase shift between two different orientations of the incident laser beam as it passes through the film stack at a fixed angle. This information is used, in conjunction with theoretical models to determine the thickness of very thin films whose optical characteristics are known. HeNe LASER Spectroscopic Ellipsometry (SE) (some models) – SE measures a parameter which is related to the phase shift of the incident light source as it passes through the film stack at a fixed angle. This information is used to directly measure the optical components of the film at many wavelengths. WL AND DUV 190- 800NM Lead time 2-3 months ARO