2012 PLASMA-THERM Versaline DSE-III

As- is

- Last knows condition: operational, GUI PC and CTC PC in e-rack are not working.

- Application: deep silicon etch

- Substrate size: 4”,6”,8”. Mechanical clamp -40C..+40C with Affinity chiller

- Semi-auto load lock, single wafer

- Plasma-Therm ICP-II DSE 3-turn source

- 3.5kW, 2MHz ICP RF package (5kW limited to 3.5kW)

- High-Speed Process Modulation w/ 1-100kHz DBS RF package for DSE

- Heated chamber 180C

- Optical End Point Detection

- Gas box with 4 lines (C4F8, SF6, Ar, O2. 400/600/50/50sccm)

- Fast gas switching option for DSE

- User terminal mobile cart

- Edwards ih80 dry pump

- Edwards xds35i load lock dry pump

- Edwards 1300l/s STPA turbo

- 380VAC 3 phase (with transformer)

- Low Maintenance Package

- Through-wall panel is not included