KLA TENCOR auto RS-55TC
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Description
- Accommodates all Wafer Sizes from 50mm – 200mm
- 5 Megaohm/sq Measurement Range
- Typical Measurement Time: 5 – 4.5 Seconds per Test Site
- <0.2% (1 sigma) Measurement Repeatability
- Thermal Chuck Temperature Measurement Accuracy: ±0.5ºC
- PC Based System Controller
- 25 MHz 486 Based MPU
- 44 MB Removable Hard Disk
- 110 MB Fixed Hard Disk Drive
- 5” Floppy Disk Drive
- X-Y Map: Up to 1200 Sites Programmable
- Probe Qualification: 20 sites
- 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included)
Specifications
| Manufacturer | KLA TENCOR |
| Model | auto RS-55TC |
| Condition | Used |
| Stock Number | GOD23082023720223380 |