KLA-Tencor UV-1050 Thin Film Measurement Tool

KLA-Tencor UV-1050 Thin Film Measurement Tool

• Cassette to Cassette Wafer Handling
• Wafer sizes: 100mm, 150mm & 200mm
• Broadband UV Optics
• Dual Beam Spectrophotometry
• Applications: Polysilicon, UV Reflectivity & Simultaneous Oxide and TiN Thickness for CMP
• System Control PC with Windows NT OS
• Summit Application Software
• GEM / SECS Communication
• System Installation at Destination Available

Wafer Size Range   Minimum 100 mm  Maximum 200 mm  Set Size 300 mm

Multi-Layer Film Capacity YES

Scanning Stage YES

Wafer Mapping YES

Controller Type PC Controller Type

Condition Excellent

Refurbished YES