1999 Eaton NV-GSD/HE

End station 120 x 95 x 102

Beam line 52 x 96 x 94

Source teminal 59 x 60 x 89

Source housing 66 x 97 x 86

Analyzer 25 x 35 x 35

Power rack1 71 x 31 x 102

Power rack2 28 x 29 x 85

Power rack3 25 x 35 x 85

Gas box 42 x 49 x 60

Pallet-1: End station door, Misc parts etc 56 x 115 x 33

Pallet-2: Teminal door, Hose, Cables 58 x 86 x 29

Pallet-3: Top plate, Misc parts etc 76 x 83 x 38

Pallet-4: Generator, Stack 42 x 49 x 28

Pallet-5: Beam door, Misc parts etc 61 x 90 x 35

Pallet-6: Door, Filter, Misc parts etc 56 x 104 x 35

Pallet-7: Lamp, Filter 42 x 49 x 31

Pallet-8: Manual, Accessories, Misc parts etc 58 x 38 x 35

Pallet-9: Compressor 50 x 50 x 29

PC, Monitor, Rack 46 x 25 x 49

Chiller 34 x 63 x 57

SMIF 17 x 24 x 75

Top plate 1 4 x 165 x 5

Top plate 2 4 x 165 x 5

Bottom plate

PROCESS: HIGH ENERGY

MOVING TYPE: DISK TYPE

DRY PUMP : N/A

CRYO PUMP : CTI ON BOARD 250F , CTI ON BOARD 10 , CTI ON BOARD 8

COMPRESSOR : CTI 9600 , CTI 9600

TMP (TURBO PUMP) : LYBOLD 75M

CHILLER : AFFINITY RWA-012J-BE03CB , AFFINITY CWA-200L-MO15CBD

GAS : ARGON , ARSINE ,PHOSPHNE