End station 93 x 107 x98

Analyzer, Source teminal 100 x 92 x 96

Power rack 110 x 32 x 89

Controller rack 29 x 29 x 85

Pallet-1: End station door, Misc parts etc 114 x 44 x 17

Pallet-2: Teminal door, Misc parts etc 112 x 44 x 17

Pallet-3: Outer door, Panel, Misc parts etc 127 x 59 x 23

Pallet-4: Top plate, Panel, Misc parts etc 56 x 57 x 27

Pallet-5: Main water panel, Hood, Lead, Misc parts etc 42 x 61 x 24

Pallet-6: Stack, Accessories, Manual 42 x 52 x 34

Pallet-7: Compressor, UPS 42 x 54 x 40

Tote box-1: Helium Hose, Cables, Misc parts etc 40 x 49 x 34

Chiller 42 x 49 x 59

Transformer 20 x 25 x 48

PC, Monitor rack 27 x 40 x 52

Bottom plate

PROCESS: HIGH CURRENT

MOVING TYPE: DISK TYPE

DRY PUMP : N/A

CRYO PUMP :SUZUKI SHOKAN (SH42) , SUZUKI A200

COMPRESSOR :SUZUKI SHOKAN C305

TMP (TURBO PUMP) : N/A

CHILLER : CWA-200L-MP-MP15BCD

GAS :ASH3 , PH3

SEN GSD-III 180