2001 LAM Rainbow 4420 Etcher
2001 LAM Rainbow 4420 Etcher
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Description
Configuration:
- Cassette to Cassette Single Wafer Etcher
- ESC
- Classic
- Particle reduction
- Orbital gas panel
- TCU 2080 Chiller
Specifications
| Manufacturer | LAM |
| Model | Rainbow 4420 Etcher |
| Year | 2001 |
| Condition | Used |
| Stock Number | GOD23082023720223393 |
| WAFER SIZE | 150mm |