Lam Research TCP 9600 SE Etcher

Condition: fully refurbished to OEM Specs.

1. Model : TCP9600SE with DSQ & APM

2. System Serial Number :

3. Operator Interface : bulkhead

4. Software : Envision

5. Transportation Wafer Size : 200mm Wafers ( 8” )

6. Indexer : Hine 38A

7. Load station: Belt type Shuttle, Standard Edge Detector & Load lifter

8. C/B Hardware Configuration

8.1 Middle Chamber: 6cm Fixed Gap(715-331131-002)

8.2 Plate Top Ceramic : 716-330122-003

8.3 Wafer Clamping : ESC (Notch)

9. RF Generator

1)    TCP : RFG1250

2)    Bias : RFG1250

3)    DSQ : RFG1250

10.  Chamber Manometer :  Main Manometer ,3Torr Manometer & Reference Manometer

11.  TCP Matcher : 853-032190-008,

12.  Bias Matcher : 853-330951-021

13.  Turbo Pump : Alcatel ATH-1300M

14.  Pressure Controller

14.1   Main : Vat Valve(64PM) & PM5

14.2   DSQ : MDVX-018 & AC-2

15.  Hinged DSQ

16.  DSQ Matcher

17.  Heated Paddle

18.  WVDS : Manual fill

19.  Chamber heater Controller: 12 Loop External Anafaze

20.  Orbitally welded Gas Box: Total 8 Gases

21.  Closed Loop He Cooling: UPC8130 & Tylan CDL-12S13(20 Torr)

22.  Remote Power Module:  Main 175A Remote Power Module

Fully refurbished to OEM specs