2022 Applied Materials Raider Edge ECD

8"

- Wafer Shape: Flat, 57 mm

- Frame Size: 6 Chamber Frame

- FI Type: 2 Loadport

- Number of Process: 1

- Number of Clean Chemistries: 2

- Loadport 1: 200 mm on 300 mm FOUP

- Loadport 2: 200 mm on 300 mm FOUP

- Loadport 3: None

- User Interface: Thru-wall, Mobile Rear

- Pre-aligner: Nine

- FI UPS: Yes

- E-90 Carrier: None

- E-84 (Optional OHT / AGV): None

- System Power: 208 V

- Surge Suppression: Yes

- Exhaust: Top

- Lighting: White

- FFU Media: Borosilicate

- Vacuum Pump: House Vacuum

- Chiller from AMAT

- Process Startup Kit: CES

- First In FAb Kit: Yes

- Drain Trunk 1: Acid

- Drain Trunk 2: IW

2022 Vintage