Horiba Instruments Incorporate PR-PD2-BLI

2 available

300mm

PR-PD2-BLI

Reticle Inspection

Reticle/Photomask Equipment

·      Factory Interface (FI) with 1 load port for SMIF pod RSP-200

·      Imaging optics

o   Laser scan microscopy using 405nm semiconductor laser as light source.

o   Particle detection using PMT.

o   Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available.

o   Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload.

o   Dual optical path allowing mask scan on both chrome and glass side without flipping.

·      Minimum defect size scanning capability:

o   0.1um and above for chrome blanks

o   0.15um and above for glass side

o   >90% capture repeatability at detection limit