2000 TEL Tokyo Electron Alpha 8SE-Z Refurbished Diffusion Vertical Furnaces

This system has been refurbished by TEL in 2018 for a project that never happened.

Now it's crated and removed from the cleanroom.

Vintage : 2000

200mm

Base unit ONO process

- Type I deep bay frame

- Waves controller

- Wafer Diameter: 8"

- Load: 170 slot boat (150 wfr load size) with boat rotation

- Heater element: 500*C – 1000*C

- Process gases: NH3, DCS, N2O, N2