KLA-Tencor Spectra-Shape 8660
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Description
KLA-Tencor Spectra-Shape 8660
Semiconductor Fabrication
Metrology Equipment
CD Measurement System
Specifications
| Manufacturer | KLA-Tencor |
| Model | Spectra-Shape 8660 |
| Condition | Used |
| Stock Number | em391 |
| WAFER SIZE | 300 |