Gasonics Aura 1000
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Description
Gasonics Aura 1000 Single wafer asher stripper
150 mm Wafer Configuration
Reduced Pressure Option
Plasma Fail Option
End Point
SECS
2 Gas Inputs
Specifications
| Manufacturer | Gasonics |
| Model | Aura 1000 |
| Condition | Used |
| Stock Number | em450 |