Steag MicroTech Marangoni Dryer
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Description
Steag MicroTech Marangoni Dryer
200mm (8") wafers, Top loading, Carrier Receiver for PFA cassettes, PVDF process tank with 2 sided overflow, Sliding Lid assembly with IPA/N2 diffuser, Quartz wafer comb, PFA coated lift arm, Resistivity monitor, Dual flow rate DI water manifold, Manually adjustable IPA flow meter, 2 IPA containers, PLC controller with LCD display, Multi-recipe controller with programmable lift rate, Poly pro top deck material.
Specifications
| Manufacturer | Steag MicroTech |
| Model | Marangoni Dryer |
| Condition | Used |
| Stock Number | em480 |
| WAFER SIZE | 200mm |