Steag MicroTech Marangoni Dryer

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Description

Steag MicroTech Marangoni Dryer

200mm (8") wafers, Top loading, Carrier Receiver for PFA cassettes, PVDF process tank with 2 sided overflow, Sliding Lid assembly with IPA/N2 diffuser, Quartz wafer comb, PFA coated lift arm, Resistivity monitor, Dual flow rate DI water manifold, Manually adjustable IPA flow meter, 2 IPA containers, PLC controller with LCD display, Multi-recipe controller with programmable lift rate, Poly pro top deck material.

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Specifications

ManufacturerSteag MicroTech
ModelMarangoni Dryer
ConditionUsed
Stock Numberem480
WAFER SIZE200mm