2003 Varian Kestrel II 750 High Energy Implanter

- Energy Range: 10 - 3750 kV

- 10 Site Disk, 10 Wafer per Batch

- Automatic Handling system

- Fully Automated Gas Box, 4 Gas Modules

-Argon (factory inlet)

- PH3 SDS

- AsH3 SDS

- BF3 SDS

- On Board Argon Option Installed (Semi Automated Filling of Stripper Reservoirs

- Software Version 6.41

Spare Parts:

- Suppression PS

- Arc Sense PS

- Analyser Magnet PS

- Power Supply Interface (PSI) Controller

- Source Vacuum Controller

- Manipulator Controller

- 30 kV Terminal PS

- 60 kV Tube Lens PS

- Accel Driver Assy

- Accel Vacuum Controller

- Stripper Valve Control Module

- He Bias PS

- Quad Double PS - Pos Neg (2)

- Faraday Supression PS

- Robot Arm Assy

- Shuttle Arm Assy (2)

- Elevator & Load Lock Platform (3)

- Scan Encoder

- Spin Motor

- Spin Encoder

- Tilt Actuator Motor

- PDC Controller

- Orient Platform & Motor Assy

- LoadLock Door Assy with Window

- Workstation

- Worksation

- GPI PCB Assy

- SST Amp Card Cage (2)

- Disk Scan Bearing

- Wafer Lifter Assy

- Miscellaneous Parts

- 8"

2003 Vintage