1995 Shibaura CDE 80 Etchers Ashers

As Is but it was in working condition before warehoused.

Wafer : 8 Inches.

Vintage : 1995.

It's complete with HDD and Software included.

Main body.

SMIF Loader

Controller

CRT

Keyboard Through the wall

SUS Front panel

Al Side panel: Ni Coated

Pump interface

Gas system:

(5) MFC Tylan FC-2900 CF4, C12, N2, 02, NF3

Quartz tube protection

C 苹 mictube

ESC Uni1.ersal chuck,

8" Wafer auxiliaries