March PX-500 Plasma Asher

150mm

As-is or refurb

- Model: PX-500 

- Downstream or Direct Plasma Asher

- Microprocessor controlled

- Two gas inputs plus Nitrogen input

- Flow Meters, Manual Adjustment

- RF Power: 13.56 MHz, 300 W, Solid state

- RF Generator: MPS-300 

- Max 3 adjustable electrodes/shelves

  - 2 Grounded

  - 1 Power 

- Shelf dimensions (each): 9"wide x 14" deep 

- 3 shelves included with system

- Edwards 40 Vacuum Pump (professionally rebuilt)

- System Dims: 26 x 20 x 30.5"D

- Weight: 83.9 kg (185 lbs.)

- Operator Manual for March PX500