Optorun OWLS-1800DV2H Optical Sputter Coater System

As-is

OPTORUN OWLS-D OPTICAL SPUTTER COATER SYSTEM consisting of:

- Model: OWLS-1800DV2H 

- Vacuum Chamber: W2540mm×H265×D2285mm (SUS304) 

- Base Plate Fixture Size: Ф375mm (Circle shape)×t5mm 

- Base Plate Rotating Speed: 10~100 rpm (usually 80rpm) 

- Target Size: Ф142×H630 Ti x2 pairs + Nbx2 pairs 

- ICP Reaction Source: RF power supply 5 kW x 2 sets 

- Transmission System: Double-arm vacuum mechanical arm  

Used for wafer-level optical components, and suitable for plating of: 

- Anti-reflection film 

- High-reflection film 

- Hard film - Color film 

- Conductive film and Insulating layer on various optical glass and silicon wafers and other optical and semiconductor applications  

Cathode Power Supply:

- Bipolar MF power supply 24kW x 2 set 

- High pulse power supply 20KW×2 set

Operational, installed in fab. 

Being Sold in As-Is / Where-Is Condition.