Shibaura Engineering Works Ltd. CDE-300

Shibaura Engineering Works Ltd. CDE-300

Metal Etch

Currently Configured for 300mm wafer size

EQUIPMENT DETAILS:

Inspect to confirm configuration and condition.

Tool has been shut down and in the clean room.

The install Type is Stand-Alone.

Off-Line Date is 2017/07/11.

All Cables are present.

The shipping Brackets are included.

Handler Type is Single wafer. (#FOUP loader)

Robot Type is RORZE RT130-521.

End-Effecter Type is RT130-521-B01.

SEMI Std Options is E84.

Power Supply is 208 VAC 60HZ 3P 31KVA.

AC Dist Box is 208 VAC 60HZ 3P 5KVA.

Heat Exchanger / Chiller is ATS DEX-20ADI *2.

Backing Pump(s) is Edward iXH1820 *3.

CDA is 160 LPM ,3/8” swagelok.

DIW is 20 LPM ,3/4” swagelok.

Vacuum is 30 LPM ,3/8” swagelok.

Power is 110V 2P.

The equipment no missing parts, but the UI computer HD is damaged